Product Features
| Wafer Diameter | 100mm, 125mm, 156mm |
| Thickness Accuracy | +0.5 nm |
| Resolution | 50 nm |
| Thickness range | 160 – 700 µm |
| Automatic wafer | no |
| Software | MXNT |
MX 203-6-41-Q
Application
Fast contactless geometry gauge for 100–156mm solar wafers.
High throughput: the MX203-6-41-q gauges with its 41 measuring points every wafer within max. 8 seconds. It controls thickness, bow and warp. Flexible wafer size adjustment by various centering-frames. Comes with our powerful MX-NT operating Software.
Measurement type
Thickness | Flatness (TTV) | Bow | Warp | sori
