Fast sheet resistance gauge for 50–200mm silicon wafers and conductive films.
The MX604-S gauges sheet resistance of semiconducting wafers and conductive films on high-ohm substrates with the reliable eddy current method. Fully self-calibrating, thus temperature and humidity changes are negligible. Integrated alphanumeric display. Workes as stand-alone or connected to a PC via serial interface, which allows collecting data of multiple measurements, mean value or standard deviation of single wafers or of complete wafer lots.
Thickness | Sheet resistance
| Wafer Diameter | 2″ to 200mm |
| Thickness | max. 1000 μm |
| Accuracy | ±3µm |
| Sensor Diameter | 20mm |
| Active Area | ca. 12mm |
| Distance from Edge | min. 10mm |
| Gap between Sensor and Table | 1400 μm |
| Measuring Table | 300 x 300 mm |
| Measuring Time | 0.3 s |
| Software | EHMaster |
