OHT Mask Automated Transfer Box / OHT Reticle SMIF Pod / RSP150
High cleanliness prevents airborne contamination, ensuring safe transportation and storage of 6-inch masks between process stations. Applicable for automated exposure machines.

Equipped with a clean air inflation feature, it can control the temperature and humidity within the light shield transfer box, creating a microenvironment. It also features a Top Flange design and supports rapid transfer through AMHS’s OHT.

It can be paired with equipment such as exposure machines, light shield inspection machines, and POD automated stockers, among other related tools used in the light shield manufacturing and transfer processes. Brands like ASML, Nikon, KLA, etc., which comply with SEMI SMIF specifications, offer compatible models for integration.