Above And Beyond metrology
Overview, insight and outlook In one process step: What was previously unthinkable in semiconductor manufacturing, the Global Nanoscope makes measurable. The entire surface of your wafer or any reflective surface is measured completely within just 30 seconds, providing reliable nanometer-scale insights that safeguard your process chain. Whether for incoming inspection in chip manufacturing or in process control during wafer fabrication: What was previously beyond the measurable, the Global Nanoscope makes visible.

• Measures the entire surface up to 300 mm at once without stitching
• No moving parts during measurement
• Extremely high resolution in the nanometer scale
• The fastest complete surface measurement on the market
• Robust against floor vibration
• Innovative technology for all reflective surfaces

• Customization high-end
  Your requirements – your tool. Our Robot Sorters are designed as a completely modular principle: individual inline measurements with our field-proven MX systems, fully automatic robotic sorting, aligner and carrier stations, tracks, cassette stations and many more. ore than 250 of these individual robot sorters have been developed for our customers and integrated into the process chain. Safety, repeatability and extremely low maintenance times are always our top priorities. And all this with an extraordinary throughput.
• All measurements and requirements in one system for up to 200 WPH
• Flexible integration of the required components
• Long lifetime & low maintenance
• Extremely short production time, individual support
• Almost all types of wafers: 150-200 mm, 300 mm, Taiko etc.
• International calibration standards, SEMI standards