Wafer SMIF Pod is able to load Cassette with wafers inside, provide protection to wafers during delivery and storage between process and process. Size comply with SEMI standard, provide high cleanliness to wafer loading and automation solution, which can be used in SEMI Auto ALU Automatic Machine.
● High cleanness transfer, Purge & Non Purge, High temperature wear resistance
● CHD with three-point positioning contact design can reduce print mark.
Wafer SMIF Pod
Wafer SMIF Pod
Door assembling with out screw design.
