13 Slot Teflon Cassette / PFA Cassette (300mm / 12 inch)

● Product name:12″ Teflon Cassette / PFA Cassette
● Part number:PF-C300-T
● Dimension:350(L) x 180(W) x 320(H)mm
● Weight:3600g
● Capacity:13 PCS
● Apply for round wafer:12 inch (Ø300mm)
● Material:Teflon / PFA
● Slot Pitch:10mm

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PFA Cassette / Teflon Cassette, Capacitor of wafer can be customized and designed by customers’ request, able to resist strong acid, strong hydrofluoric acid, strong base and heat up to 200~220℃, use to deliver wafers in acid & base process of Fabrication factory.

PFA Cassette / Teflon Cassette 6″、8″、12″ 13 slot

Product Feature


 Choose Cassette:
Material Degree of temperature resistance Property Application
PFA Cassette 200~220℃ Strong acid, strong hydrofluoric acid, strong base resistant For acid& base process
PP Cassette 40~60℃ Pros: Light weight, able to welding Cons: Distort easily For general transfer process
PEEK Cassette 120℃ High hardness, not easy to distort, high temperature resistant
PC Cassette 80~100℃ Light weight, able to welding
PEI Cassette 130~150℃ Wear resistant, anti-static

Customized


● Able to do laser engraving、Able to install RFID. Keep the track of carrier and material.

PFA Cassette / Teflon Cassette
Able to install RFID

PFA Cassette / Teflon Cassette
Cassette Able to do laser engraving

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