PFA Cassette / Teflon Cassette, Capacitor of wafer can be customized and designed by customers’ request, able to resist strong acid, strong hydrofluoric acid, strong base and heat up to 200~220℃, use to deliver wafers in acid & base process of Fabrication factory.

PFA Cassette / Teflon Cassette 6″、8″、12″ 13 slot

Product Feature

Choose Cassette：

Material	Degree of temperature resistance	Property	Application
PFA Cassette	200~220℃	Strong acid, strong hydrofluoric acid, strong base resistant	For acid& base process
PP Cassette	40~60℃	Pros: Light weight, able to welding Cons: Distort easily	For general transfer process
PEEK Cassette	120℃	High hardness, not easy to distort, high temperature resistant
PC Cassette	80~100℃	Light weight, able to welding
PEI Cassette	130~150℃	Wear resistant, anti-static