200mm (8 inch) 13 Slot Special Wafer Cassette (PEI Cassette)

● Product name:Special Wafer Cassette (PEI Cassette)
● Part number:PE-C200-S
● Dimension:292.2(L) x 220.53(W) x 325.88(H)mm
● Weight:2130g
● Capacity:13 PCS
● Apply for round wafer:8 inch (Ø200mm)
● Material:PEI
● Slot Pitch:18.5mm

Category: Tag:

Degree of temperature resistance 120℃.

Product Feature


Material Degree of temperature resistance Property Application
PFA Cassette 200~220℃ Strong acid, strong hydrofluoric acid, strong base resistant For acid& base process
PP Cassette 40~60℃ Pros: Light weight, able to welding
Cons: Distort easily
For general transfer process
PEEK Cassette 120℃ High hardness, not easy to distort, high temperature resistant
PC Cassette 80~100℃ Light weight, able to welding
PEI Cassette 120℃ Wear resistant, anti-static

Customized


● Able to do laser engraving、Able to install RFID. Keep the track of carrier and material.

Able to install RFID

Cassette Able to do laser engraving

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