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Platen Refurbishment
Entrepix provides a full, turn-key refinish and refurbishment service for CMP platens of all shapes and sizes.
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Polishing Templates
PR Hoffman works with each customer to achieve an approved design so you can be sure the template you receive will meet your physical specifications and perform well in your unique processing environment. Templates can be used in any polishing application, flip polish, touch polish, single-side polish, or CMP. This product can help to save both time and money by eliminating the repetitive work required when wax mounting, de-mounting, and then cleaning the wax from the part. PR Hoffman custom manufactures template assemblies for any single-side process such as Silicon wafers, Silicon Carbide (SiC) wafers, compound substrate wafers, glass wafers, ceramics, and glass along with virtually any flat and parallel part that requires a polished surface.
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Refurbishment Services
Entrepix remanufactured equipment provides the performance of brand new equipment with costs that fit your budget
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Robot Sorters
- Customization high-end
Your requirements – your tool. Our Robot Sorters are designed as a completely modular principle: individual inline measurements with our field-proven MX systems, fully automatic robotic sorting, aligner and carrier stations, tracks, cassette stations and many more. ore than 250 of these individual robot sorters have been developed for our customers and integrated into the process chain. Safety, repeatability and extremely low maintenance times are always our top priorities. And all this with an extraordinary throughput. - All measurements and requirements in one system for up to 200 WPH
- Flexible integration of the required components
- Long lifetime & low maintenance
- Extremely short production time, individual support
- Almost all types of wafers: 150-200 mm, 300 mm, Taiko etc.
- International calibration standards, SEMI standards
- Customization high-end
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Sapphire Wafers
- PRIME grade high quality sapphire wafer
- Sapphire wafers with C, A, and R plane crystal orientation
- 2” to 150mm wafers available
- Kr grown with high purity, 99.998%
- Single or both sides polished and EPI finish available
- Very low roughness and defect free for EPI growth
- Supply and Shipment Worldwide from Stock or on short lead times
- Buy Sapphire wafers online
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Silicon Wafer for Research & Production
- Prime Grade high quality Silicon Wafers
- 1″, 50mm, 100mm, 125mm, 200mm & 300mm diameters
- P, N Type or Intrinsic Si Wafers
- Single (SSP) or Double Side Polish (DSP)
- Wet & Dry Oxide, Nitride plus other coatings & processing
- Rapid supply and shipment worldwide from stock
- Available in small to large quantities
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SOI Wafer for Research & Production
- PRIME grade high-quality SOI wafers
- Exceptional device layer TTV control
- 3” to 200mm SOI wafers available
- Bonded SOI from device layers of 1.5um to >300um
- Any dopant and Si orientation
- Backside with oxide coating and laser marking available
- Supply and Shipment Worldwide from Stock or on short lead times
- Buy silicon on insulator wafers online
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SOS Wafer – Silicon on Sapphire
- PRIME grade high quality silicon on Sapphire Wafers (SoS)
- EPI Si on Sapphire with R (1102) plane crystal orientation
- 3” to 200mm wafers available
- Kr grown substrates with high purity 99.998%
- Range of Si thicknesses
- Single or both sides polished available
- Very low roughness and defect free
- Supply and shipment worldwide from stock or on short lead times
- Buy Silicon on Sapphire wafers online
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Spare Parts for AMAT Reflexion
Entrepix provides parts, upgrades, service, and refurbishment services and refurbished tools for the Applied Materials Reflexion® 3600, Reflexion LK 3800, Reflexion LK Prime®, and Reflexion LK Prime® S integrated CMP tools.
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TENSOR D-Rinse
Additive For High Pressure Pad Rinse/Wafer De-Chucking Cycles
Tensor D-Rinse is a specially formulated additive designed for use in high-pressure pad rinse and wafer de-chucking systems of today’s CMP tools.
Application areas:
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TENSOR DG Series
Cleaning Solutions for IC Manufacturing
TENSOR DG Series Products are aqueous detergents formulated to facilitate the removal of organic and inorganic films, combinations of films, particles and debris from the surface of the substrate. When the correct TENSOR DG Series Product is selected, corrosion/oxidation of films and/or interconnect structures is eliminated.
Application areas:
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The New Entrepix DSS-200
The new generation OnTrak system is here, directly from the OEM
The modernized Entrepix DSS-200 double-sided post-CMP wafer cleaner offers the same familiar functionality as the legacy OnTrak system with numerous upgrades for today’s cleaning process demands.As the OEM for OnTrak systems, Entrepix has engineered the NEW DSS-200 OnTrak for reliability and longevity with support and spares you can depend on.
Our DSS-200 cleaners offer:
- Parts exchangeability with legacy OnTrak systems
- Replacement and modernization of obsolete parts
- Configuration for 100-200mm substrate
- Accommodation for smaller wafers with custom-designed carriers