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200mm(8 inch) PEI Wafer Cassette
● Product name：8″ PEI Wafer Cassette
● Part number：PE-C200
● Dimension：234.5(L) x 202.31 (W) x 2 17.8 5(H)mm
● Weight：932.5g
● Capacity：25 PCS
● Apply for round wafer：8 inch (Ø200mm) Wafer
● Material：PEI ESD
● Slot Pitch：6.35mm
● Degree of temperature resistance：120°C -
200mm(8 inch) Wafer Cassette
● Product name：8″ Wafer Cassette
● Part number：PP-C200
● Dimension： 235(L) x 214(W) x 219(H)mm
● Weight：900g
● Capacity：25 PCS
● Apply for round wafer：8 inch (Ø200mm) Wafer
● Material：ESD Resin
● Slot Pitch：6.35mm -
300mm (12 inch) Horizontal Wafer Shippers / Wafer Stack Box
● Product name：12″ Horizontal Wafer Shippers / Wafer Stack Box
● Part number：HW-S300
● Dimension：343(L) x 343(W) x 110.5 (H)mm
● Weight：1400g
● Capacity：25 PCS
● Apply for round wafer：12 inch (Ø300mm)
● Material：PP ESD -
8 inch to 12 inch FOUP adaptor
● Product name：FOUP Adapter
● Part number：AD-F200
● Dimension：440(L) x 347(W) x 337(H)mm
● Capacity：13 PCS
● Apply for round wafer：8 inch (Ø200mm) Wafer
● Material：PC ESD -
AMAT Reflexion
Entrepix provides parts, upgrades, service, and refurbishment services and refurbished tools for the Applied Materials Reflexion® 3600, Reflexion LK 3800, Reflexion LK Prime®, and Reflexion LK Prime® S integrated CMP tools.
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Belt Sorters
Customization Made Easy
Whether for incoming and outgoing inspection, quality control in the production process: safety and reliability are always the focus of our modular belt sorter systems. The modules enable specific sorting and measurements with our well proven MX systems, belt transport, receiving stations with wafer switches and much more. More than 35 years of development ensure smooth integration into your production chain – exactly as your process requires.
- Convenient measuring systems for all common wafer characteristics
- Flexible integration of MX 202 modules and individual components
- Long lifetime & low maintenance
- Extremely short production time, individual support
- Many different wafer types and sizes
- Speed: up to 1000 wafers per hour
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Compound Semiconductor Wafer
- GaN, SiC, GaAs, InP, and other III-V Wafer materials
- Prime Grade high quality Wafers
- 50mm, 100mm, and 150mm diameters
- N or P Type Semi Conducting or Semi Insulating Wafers
- Single (SSP) or Double Side Polish (DSP)
- Full data sheets available with each shipment
- Rapid supply and shipment worldwide from stock
- Available in small to large quantities
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Custom Mask Cassette
● Product name：Custom Mask Cassette
● Capacity：15 PCS
● Mask size：5 inch / 8 inch
● Material：PTFE -
CVD CMP Pad Conditioner
- Various patterns can be arranged CVD diamond coated tips
- Apex of the CVD diamond coated tip is flat face
- Allows to engineer the critical pressure applied to each tip for pad conditioning
- EHWA has a patents on the tip size and number for pad conditioning
- The apex where contacts the pad has not changed over the conditioning time
- Pad cut rate is constant
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Electroplated CMP Pad Conditioner
- Mechanical Bonding (Ni plating)
- Excellent disk flatness : Superior wafer uniformity
- Clean disk surface : Near zero micro scratches.
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Entrepix Entegrity Polish Head Tester
Entrepix’ next-generation head tester puts the data in your hands to achieve less downtime and significant cost savings.
Entrepix designed this innovative, customer-favorite head tester through years of testing and troubleshooting. Now the head testing step transforms from a simple verification tool in the legacy version into a powerful troubleshooting platform. The new Entrepix head tester provides powerful troubleshooting capability that helps users dial in sensitive CMP processes while tracking each head via serial number. Our tester simulates wafer de-chuck and automatically checks the wafer present/absent sensor function, all while tracking test data for statistical process control.
Available in 6 zone for Titan I, Titan II (Profiler), and Contour polish headsAvailable in 8 zone for Titan I, Titan II (Profiler), Contour and EVO polish heads.
Entrepix’ head tester allows real-time monitoring of “cross-talk” between head chambers and allows users to interrupt testing for faster chamber troubleshooting. -
Entrepix IPEC 472 Support
Entrepix offers upgrades, refurbishments, and spare parts for your IPEC 472 platforms.