| Wafer Diameter | up to 200mm |
| Thickness Accuracy | ±0.5µm |
| Resolution | 0.1µm |
| Thickness range | default 450 – 750µm |
| Switchable to measure high res material | Yes |
| Software | EHMaster |
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MX 301-Q
Application
Easy one-point thickness gauge for 30–200mm non-conductive wafers.
The MX301-Q is a robust and stable instrument for quick and simple manual thickness gauge. Made for a large variety of wafers consisting of insulating materials like quartz, sapphire or glass. Fully self-calibrating without the need for gauge blocks nor reference wafers. With integrated 5-digit display. Workes as stand-alone or connected to a PC via serial interface, which allows collecting data of multiple measurements, calculating flatness (TTV), mean value or standard deviation of single wafers or of complete wafer lots.
Measurement type
Thickness
