| Wafer Diameter | 150mm, 200mm |
| Accuracy | ±0.5 µm |
| Resolution | 50nm |
| Thickness range | 400 – 1000 µm |
| Automatic wafer | yes |
| Software | MXNT |
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MX 203-8-37
Application
Fast contactless geometry gauge for 150mm and 200mm silicon wafers.
High throughput: the MX203-6-33 gauges with its 37 measuring points every wafer within max. 8 seconds. It controls thickness, bow and warp. Wafer stress evaluation is optionally available. Flexible wafer size adjustment by various centering-frames. Comes with our powerful MX-NT operating software
Measurement type
Thickness | Flatness (TTV) | Bow | Warp
