| Wafer Diameter | 2″ to 8″ |
| Thickness Range | 60 – 300µm or 250 – 750µm |
| Thikness Accuracy | ± 1µm |
| Sensor Diameter | 20 mm |
| Active Area | 8 mm Ø |
| Distance from Edge | 10 mm |
| Measuring Time | 0.3 s |
| Software | EHMaster |
Roll over image to zoom in
MX 604-ST
Application
Combined thickness and resistivity gauge for up to 156mm solar wafers
The MX604-ST is designed to characterize solar wafers. Fits square wafers up to 156mm and round wafers from 2″ to 200mm. It combines sensors for measuring thickness and resistivity simultaneously. Fully self-calibrating, thus temperature and humidity changes are negligible. Integrated alphanumeric display. Workes as stand-alone or connected to a PC via serial interface, which allows collecting data of multiple measurements, mean value or standard deviation of single wafers or of complete wafer lots.
Measurement type
Thickness | Resistivity
