| Work piece size | Maximum 200mm×200mm (Contact us if you want to handle more than 200mm） |
| Scanning method | XY scanning or Rotation scanning |
| Inspection time | Square shape of 200mm is approx. 4min／Wafer shape of 200mm is approx. 3min |
| Work piece setting | Robot transfer |
| Dimension | W1,320mm X D1,000mm X H1,700mm |
| Weight | Approx. 800 Kg |
| Power Consumption | Approx.1.5ｋW (100V) |
| Target substrate | Silicon wafer、Filmed wafer |
| Maximum sensitivit | 0.1um on Bare silicon |
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YPI – N series (Automated transfer)
Wafer surface inspection system YPI-N series（Auto loading）
Can scan particles on mirror wafer (silicon wafer) with fast.
Wide range measurement from small size wafer (2/3inch) to 8inch wafer.
