| Work piece size | Maximum ２００ｍｍ×２００ｍｍ (Contact us if you want to handle more than 200mm） |
| Scanning method | XY scanning or Rotation scanning |
| Inspection time | Square shape of 200mm is approx. 4min／Wafer shape of 200mm is approx. 3min |
| Work piece setting | Manual |
| Dimension | W900mm X D1,000mm X H1,757mm |
| Weight | Approx. 500 Kg |
| Power Consumption | Approx.1.5ｋW (100V) |
| Target substrate | Silicon wafer, Filmed wafer |
| Maximum sensitivit | 0.1um on Bare silicon |
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YPI – N Series (Manual)
YPI – N – XY/YPI – N – Θ
Wafer surface inspection system YPI-N series（Manual）
Can scan particles on mirror wafer (silicon wafer) with fast.
Wide range measurement from small size wafer (2/3inch) to 8inch wafer.
