FILCON ® SR · SE Combo Spectroscopic Reflectometer​

SR · SE is a Combo Metrology that integrates a reflectometer and an ellipsometer into one device.

It is a hybrid thin-film measuring device that maximizes measurement ability and utilization to enable high-level research and development purposes and simple repetitive measurement work by combining the advantages of reflectometer and ellipsometer. In order to supplement the measurement accuracy of SR (Reflectometer), which is generally less reliable in measuring thin films of several nanometers or less, a separate SE (Ellipsometer) is used for Å level thickness measurement, material-specific optical constants (n, k) measurement, and material characterization. measured using it. FILCON SR · SE is a cost-effective and powerful multi-purpose thin film measurement instrument that integrates SE’s unique precision measurement and analysis capabilities and SR’s ease of use into one instrument .