FILCON ® SR FAB Fully Automatic Mapping Spectroscopic Reflectometer

FILCON SR-FAB is a full-automatic spectroscopic reflectance measurement equipment for semiconductor clean rooms that can automatically measure the thickness (t), reflectance, and transmittance of transparent thin films of several nanometers to several tens of mm by calling a pre-written mapping recipe from upper host communication. is. It meets the optimal automated metrology measurement requirements for in-line remote measurement with various options that enable micro-area target measurement of pattern wafers. It is possible to configure a unique low-cost system in the form of fully automated all-in-one metrology optimized for small wafers under 8” and various customized in-situ automated metrology equipment based on EFEM consisting of SMIF, multiple load ports and state-of-the-art transfer robots.