For general process. Wafer carrier and used to transfer between station and station. Provide suitable characteristics of the polymer composite material according to customer’s needs. It can collocation with airtight storage box to protect wafer.
● ESD material are provided.
● Use to transfer inside factory
● Able to go with airtight Storage Box to protect wafer
Product Feature
| Material | Degree of temperature resistance | Property | Application |
| PFA Cassette | 200~220℃ | Strong acid, strong hydrofluoric acid, strong base resistant | For acid& base process |
| PP Cassette | 40~60℃ | Pros: Light weight, able to welding Cons: Distort easily |
For general transfer process |
| PEEK Cassette | 120℃ | High hardness, not easy to distort, high temperature resistant | |
| PC Cassette | 80~100℃ | Light weight, able to welding | |
| PEI Cassette | 130~150℃ | Wear resistant, anti-static |
Customized
● Able to do laser engraving、Able to install RFID. Keep the track of carrier and material.
Able to install RFID
Cassette Able to do laser engraving
