FILCON® SR 300S Mapping Spectroscopic Reflectometer

FILCON SR-300S is a micron-level precision XY stage and granite plate that can automatically measure the thickness (t), reflectance, and transmittance of transparent thin films of several nanometers to several tens of mm with a pre-written mapping measurement recipe using vertically incident light. It is a stand-alone automatic non-contact spectroscopic reflection measurement equipment with a rigid structure based metrology frame. It is equipped with advanced spectroscopic measurement options such as auto-focus and vision PRS pattern matching for precise measurement of micro-regions of wafer patterns, enabling precise measurement .