Mapping Spectroscopic Reflectometer

FILCON SR-300R is an R-Theta motor stage structure that can measure the thickness (t), reflectance, and transmittance of a transparent thin film of several nanometers to several tens of mm with pre-written mapping measurement recipe using vertically incident light with sub-nm precision. It is a tabletop automatic mapping spectroscopic reflection measurement equipment.

By easily creating map recipes for ~300mm wafers, you can perform thin film characteristic analysis at high speed, and measurement result display, report output, and 2D/3D graphic analysis tools are provided. It is a state-of-the-art spectroreflection measurement instrument that can be used immediately even by users without professional knowledge with a user-friendly Windows-based instrument program and an easy interface .