| Wafer Diameter | up to 150mm |
| Sensor Area Ø | 10mm |
| Thickness range | 350 – 650 µm |
| Measuring Time | max. 4 sec. |
| Reproducibility | ± 1% |
| Software | EHMaster |
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MX 601
Application
Fast contactless resistivity gauge for semi-insulating wafers up to 150mm.
The MX601 gauges resistivity of wafers made of semi-insulating materials like Gallium Arsenide or Silicon Carbide. Fast handling without wafer preparation and excellent repeatability with best avoidance of piezo-electric effects. MX601’s serial interface allows data evaluation and statistics, as well as access to calibration constants and output types.
Measurement type
Thickness
