The DSS-200 comes in three configurations: CE, Synergy, and Integra.
DSS-200 applications include:
- Post-CMP clean
- Pre-bond clean
- Pre-photo clean
- Advanced packaging applications
- Post-metal deposition
- Post-ILD depositionPost-scribe
- Substrate manufacturing
OnTrak Upgrades
Upgrades for legacy OnTrak systems with OEM support are available for you, ready to go when you are. Upgrade options include:
- Control system and software upgrade
- Hastelloy spin carriage
- High efficiency heat lamp
- Megasonic cleaning
- DI water conservation
- Through-the-brush delivery
- Inline mix dilution
OnTrak Parts Support
Entrepix provides high quality OEM components not only for the new generation of DSS-200 cleaners, but also for the Lam OnTrak DSS Series 1, Series 2 Classic and CE, Synergy, and Integra platforms.
All OnTrak parts are selected or designed to meet and exceed original standards. We provide thorough incoming and outgoing inspections to ensure our customers get exactly what they need.
PM Kit Custom Solutions
Whether you have a brand new DSS-200 with a standard configuration, or have a decades-proven OnTrak system with a multitude of customizations, we have a PM kit for you. Our group of experts and engineers can advise you on the best solution to fit your needs and can assemble together a PM kit for your specific application.
| Entrepix Series 2 CE | Entrepix Synergy | Entrepix Integra | |
|---|---|---|---|
| Cleaning Method | Brush Scrub | Brush Scrub | Brush Scrub |
| Integrated | No | No | Yes |
| Brush Type | Roller PVA | Roller PVA | Roller PVA |
| Downforce Control | Yes | Yes | Yes |
| Edge Scrub | Optional | Optional | Optional |
| MegPie™ Megasonic Transducer | Optional | Optional | Optional |
| Megasonic Nozzle | Optional | Optional | Optional |
| High-Pressure DI Water Spray | Optional | Optional | Optional |
| Heated DI Water Feed | Optional | Optional | Optional |
| Drying Method | Spin + Heat Lamp | Spin + Heat Lamp | Spin + Heat Lamp |
| NH4OH | Yes | Yes | Yes |
| dHF | No | Yes | Yes |
| SC-1 | Pre-Diluted: Yes | Yes | Yes |
| SC-2 | Citric-Based: Yes | Citric OR HCL-Based: Yes | Citric OR HCL-Based: Yes |
| Backside Chemical | Yes | Yes | Yes |
| Metal CMP Cleans | Yes | Yes | Yes |
| STI CMP Cleans | Yes | Yes | Yes |
| Double Contained Process Area | No | Yes | Yes |
