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AMAT Reflexion
Entrepix provides parts, upgrades, service, and refurbishment services and refurbished tools for the Applied Materials Reflexion® 3600, Reflexion LK 3800, Reflexion LK Prime®, and Reflexion LK Prime® S integrated CMP tools.
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Entrepix Entegrity Polish Head Tester
Entrepix’ next-generation head tester puts the data in your hands to achieve less downtime and significant cost savings.
Entrepix designed this innovative, customer-favorite head tester through years of testing and troubleshooting. Now the head testing step transforms from a simple verification tool in the legacy version into a powerful troubleshooting platform. The new Entrepix head tester provides powerful troubleshooting capability that helps users dial in sensitive CMP processes while tracking each head via serial number. Our tester simulates wafer de-chuck and automatically checks the wafer present/absent sensor function, all while tracking test data for statistical process control.
Available in 6 zone for Titan I, Titan II (Profiler), and Contour polish headsAvailable in 8 zone for Titan I, Titan II (Profiler), Contour and EVO polish heads.
Entrepix’ head tester allows real-time monitoring of “cross-talk” between head chambers and allows users to interrupt testing for faster chamber troubleshooting. -
Entrepix IPEC 472 Support
Entrepix offers upgrades, refurbishments, and spare parts for your IPEC 472 platforms.
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Equipment Upgrades
Entrepix’ OEM-level upgrades provide greater efficiency, accuracy, and reliability.
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Platen Refurbishment
Entrepix provides a full, turn-key refinish and refurbishment service for CMP platens of all shapes and sizes.
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Refurbishment Services
Entrepix remanufactured equipment provides the performance of brand new equipment with costs that fit your budget
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The New Entrepix DSS-200
The new generation OnTrak system is here, directly from the OEM
The modernized Entrepix DSS-200 double-sided post-CMP wafer cleaner offers the same familiar functionality as the legacy OnTrak system with numerous upgrades for today’s cleaning process demands.
As the OEM for OnTrak systems, Entrepix has engineered the NEW DSS-200 OnTrak for reliability and longevity with support and spares you can depend on.
Our DSS-200 cleaners offer:- Parts exchangeability with legacy OnTrak systems
- Replacement and modernization of obsolete parts
- Configuration for 100-200mm substrate
- Accommodation for smaller wafers with custom-designed carriers