Integrated XRD & Lifetime Analysis
MX 202 WaferStream is a state-of-the-art modular belt sorter, delivering highest wafer throughput, even surpassing modern robot sorters. Thanks to its modular design, it is freely configurable and can be upgraded at any time to grow with your needs:
- Several 100 up to 1000 wafers per hour
- Comprehensive measurement options, e.g. warp, bow, tickness/TTV, resistivity & many more
- For various materials & wafers up to 210mm diameter (300 mm on request)
- System intelligence & full process control by optical wafer tracking
- Unique India Handotai Geohead technology for wafer geometry measurement
- Full SECS/GEM connectivity, including customized recipes & wafer classes
- Manual or SEMI E84 automated carrier hand-off (AGV, OHT)
XRD Advantages
Despite their modular design, all our belt sorters share some unbeatable advantages:
- Mature, stable, and safe: based on decades of know-how, our belt sorters are continuously advanced & improved, culminating in the MX 202 WaferStream. In an industrial landscape where process reliability is the most important asset, we offer an unmatched competitive advantage
- High Speed: Time is throughput is cash. With several 100 up to 1,000 wafers per hour and extremely reliable measurement results, we help you gaining efficiency via production time
- Budget-friendly: All our components require exceptionally low maintenance, combined with low initial costs and extremely long lifetime.
- Process integration: Your Belt Sorter system can be seamlessly integrated into your process chain, just as our MX-NT V2 operating software can be integrated into your IT landscape
- Consulting and support: Individual consulting and planning are part of our DNA – including uncomplicated on-site support of our world-wide distributors.
Lifetime Advantages
Customers use our Belt Sorters for a wide range of applications.
- Examples for typically installed measuring modules: Unique IH Geohead sensor array AZ6 (6-33) or AZ8 (8-37) for wafer geometry, High throughput T-Module with single thickness sensor pair, Resistivity module with self-calibrating eddy current sensors, P/N sensor for doping type determination, and various types of readers (OCR, RFID, barcode).
- Wafer handling modules: Sender/receiver lifts, Aligner, Wafer switches to distribute Wafers in receiver area, movable units with mounted lifts, pass through stations.
- Software: All IH wafer gauges & automation solutions are controlled by the powerful MX-NT V2 software, including evaluation and visualization. MX-NT V2 merges more than 30 years of IH expericence in semiconductor requirements.Sorting by any gained characteristic, such as grouping by thickness, warp or resistivity can be done by highly flexible and reusable recipes.All data can be stored in a MS SQL Server data base or alternatively also into MS Access data bases.
Powerful software options such as full SECS/GEM connectivity including E84 or our similar proprietary Simple Soap Server One (S³O) interface allow seamless integration of E+H tools into your production plant.
