| Work piece size | Maximum 500mm X 500mm |
| Scanning method | XY scanning |
| Inspection time | Square shape of 500mm is approx. 25min |
| Work piece setting | Manual |
| Dimension | W1,150 X D1,100 X H1,135 (mm) |
| Weight | Approx. 500 Kg |
| Power Consumption | Approx.1.5ｋW (100V) |
| Target substrate | Transparent substrate, Filmed transparent substrate, film sheet. Surface isolated detection sensor can be attached as option. |
| Maximum sensitivit | 0.5um on transparent substrate |
Roll over image to zoom in
YPI – 500
YPI – 500 – Inspection system for large glass substrate
Can inspect surface particles for large size glass substrate and film sheet.
Apply to warpage for sample center position with auto focus sensor unit.
