MX 604

Application

Fast contactless resistivity gauge for silicon blocks.

The MX604 gauges resistivity of silicon blocks of any size with the reliable eddy current method. It allows connecting up to 4
different sensor probes (alternatively) to measure different resistivity ranges. Integrated alphanumeric display. Workes as stand-alone or connected to a PC via serial interface. Our optional software EHMaster allows further evaluation of the measurements and configuration
of the tool.

Measurement type

Thickness

Category:

Product Features

Standard measuring range (one sensor) 0.25 Ω cm – 25 Ω cm
Accuracy ± 3%
Software EHMaster