| Standard measuring range (one sensor) | 0.25 Ω cm – 25 Ω cm |
| Accuracy | ± 3% |
| Software | EHMaster |
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MX 604
Application
Fast contactless resistivity gauge for silicon blocks.
The MX604 gauges resistivity of silicon blocks of any size with the reliable eddy current method. It allows connecting up to 4
different sensor probes (alternatively) to measure different resistivity ranges. Integrated alphanumeric display. Workes as stand-alone or connected to a PC via serial interface. Our optional software EHMaster allows further evaluation of the measurements and configuration
of the tool.
Measurement type
Thickness
